Abstract
Laser recrystallized low temperature poly-silicon films have attracted attention for their applications in thin-film transistors (TFTs), which are widely used in active matrix displays. The electrical characteristics of the poly-silicon film may vary because of its grain boundaries. In this work, the variation is statistically studied with respect to the threshold voltage and mobility of the TFTs. The threshold voltage and mobility of many closely-located TFTs are measured. These two parameters correspond to the deep states and tail states of the poly-silicon film, respectively. The mutual difference of two threshold voltages exhibits the distribution in a Gaussian–Lorentzian cross product form. On the other hand, the mutual difference of two mobility exhibits the distribution of Lorentzian function. This result directly reflects the local fluctuations and the spatial trends of the deep and tail states in a poly-silicon film.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
