Statistical process control implementation for GaAs integrated circuit fabrication

Abstract

The author describes the important gains to be made by employing statistical process control (SPC) in GaAs IC manufacturing, provides a brief introduction to the important concepts of SPC, reviews the elements necessary for successful SPC implementation, and gives an overview of SPC implementation at a GaAs IC fabrication facility. It is noted that methodical application of SPC techniques to the manufacture of GaAs ICs reduces product variability and ultimately cost and yield through control of critical process parameters. Successful implementation depends on management commitment and training for all who are working with the system. Benefits are realized by using SPC measurement indices to identify problem areas, and then by application of control charts, designed experiments, and appropriate process modifications to reduce variation. >