Abstract
The morphology of a Nickel layer grown by an Electroless Nickel Immersion Gold (ENIG) technique used for microelectronics interconnections is determined by Atomic Force Microscopy (AFM) investigations. The root mean square (rms) roughness, determined over a scanned area is a function of the AFM scanned area size. In this work, we propose to consider the dynamic scale theory and the power spectrum density (PSD) analysis in order to perform a comprehensive determination of the surface properties of the ENIG nickel layer. Results highlight the existence of a first regime with a roughness exponent of 0.95 and a fractal dimension (DF) of the nickel film about 2.05. This case study is presented in order to propose further investigations. In fact, same experimental procedure should be performed in a magnetic shielded zone where a very low noise level is available such as the Low-Noise Underground Laboratory (LSBB) of Rustrel (France).
Highlights
In order to explore optical, mechanical, electrical and chemical properties of surfaces, quantitative investigations of surface morphology are important requirements to perform comprehensive studies
The morphology of a Nickel layer grown by an Electroless Nickel Immersion Gold (ENIG) technique used for microelectronics interconnections is determined by Atomic Force Microscopy (AFM) investigations
We propose to consider the dynamic scale theory and the power spectrum density (PSD) analysis in order to perform a comprehensive determination of the surface properties of the ENIG nickel layer
Summary
In order to explore optical, mechanical, electrical and chemical properties of surfaces, quantitative investigations of surface morphology are important requirements to perform comprehensive studies. Based on the interactions between this tip and the probed surface, the deflection of the cantilever is measured and controlled via an optical system. While the tip scans the surface, a feedback loop is used to determine the topography when the system is maintaining a constant deflection value. For a first order statistics, the morphology of the sample is often characterized by the Root Mean Square (RMS) roughness. This statistic parameter is determined over the fixed scanned area. Dynamic scale analysis and Power Spectral Density (PSD) were developed [6] to describe more accurately the surface properties. We propose to use the dynamic scale analysis of a nickel layer surface grown in a microelectronic cleanroom as an UBM (Under Bump Metallization) for interconnections
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