Statistical comparison between inductively coupled plasma-mass spectrometry, and Hall effect techniques using antimony-doped germanium

Abstract

Two independent characterization techniques, Hall effect, and inductively coupled plasma-mass spectrometry (ICP-MS) were used to measure the antimony (Sb) concentration in antimony-doped germanium single crystals and then these results were directly compared to each other. The three single liquid-encapsulated Czochralski-grown crystals had initial concentrations ranging from 1×10 15 to 1×10 17 at/cm 3 Sb. The reproducibility of the ICP-MS measurements was quantified and an estimate of error was obtained using a reproducibility study and a components of variation study for the concentration range of the crystals investigated. The total average error for the ICP-MS measurements was found to be 8.66% with a future prediction interval of ±14.22%. The two techniques were shown to be statistically significantly correlated with each other. The ICP-MS and the Hall effect techniques had nearly identical agreement when these two techniques were directly compared to each other.