Abstract

Limburgs Univ Ctr, Inst Mat Res, B-3590 Diepenbeek, Belgium. XPEQT, B-3980 Tessenderlo, Belgium. IMEC, B-3001 Heverlee, Belgium. Chartered Semicond Mfg Ltd, Singapore 738406, Singapore.Andries, E, Limburgs Univ Ctr, Inst Mat Res, Wetenschapspk 1, B-3590 Diepenbeek, Belgium.

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