Statistical and systematical errors in RBS depth profiling of implanted atoms

Abstract

Simple expressions for estimation of statistical uncertainties in depth-profile parameters determined using standard RBS technique are derived. Possible sources of systematic uncertainties are also discussed along with some simple procedures for their elimination. For the simple case of RBS depth profiling of heavy atoms implanted into light matrices at low implantation energies statistical uncertainties as low as < 1% ( R p), < 5% ( ΔR p), < 20% (profile skewness) and < 10% (profile kurtosis) may be achieved providing the measuring statistics is sufficiently high.