Static tilt characteristics of aerostatic rectangular double-pad thrust bearings with double row admissions

Abstract

Aerostatic thrust bearings have been used in linear guideway systems of various precision measuring apparatus by reasons of low friction, non-hysteresis and high accuracy of motion. In such a case that the measuring systems do not satisfy the Abbé principle, the accuracy of linear guideway systems is greatly influenced by the tilt characteristics in pitch, roll and yaw directions of aerostatic thrust bearings. This paper proposes the application of aerostatic rectangular double-pad thrust bearings with double row admissions of compound restrictors to the linear guideway systems subjected to tilt moments in both pitch and roll directions, and investigates, theoretically and experimentally, the static tilt characteristics of these aerostatic thrust bearings.