Abstract
Electrostatic microbeams have a special place in advanced technology as part of microelectromechanical systems (MEMS). So accurate modeling and providing suitable methods for solving governing equations their mechanical behavior is of great importance. Stepped microbeams are widely used in MEMS industries. In this paper, based on the nonclassical theory of strain gradient, static analysis of a stepped microbeam with boundary conditions of clamped-free (CF) has been investigated. The governing equations are transformed into nondimensional form and then solved using differential quadrature (DQ) method. Length scale parameter of the Polyaniline (PANI) also obtained. Most of the microbeams which made of Gold, Nickel or Silicon were analyzed, but we used variety of conductive polymers in this work. The results show that conductive polymer microbeams can be a suitable substitute for expensive metals. The results can be used to design and improve the performance of MEMS devices.
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