Static model for flexure-based compliant mechanism driven by piezo stacks

Abstract

Flexure-based compliant mechanisms have been used in ultra-precision stages, stages for nano-imprint machines, AFM scanners, and MEMS structures, etc. In this paper, a mathematical static model for flexure-based compliant mechanism driven by piezo stacks is derived. The force vector generated from piezo stacks was linearized in terms of displacement and applied voltage vectors. Then, the piezo force vector was substituted into the static model of a compliant mechanism. Finally, the force and the displacement vectors of input bodies, and the block force and the displacement vectors of output bodies were derived. The derived mathematical model was verified by FEM analyses and experiments. The derived mathematical model can well describe the static performance of a flexure-based compliant mechanism driven by piezo stacks.