Abstract
Flexure-based ultra-precision parallel mechanisms have inherent difference between input and actual output. Lost motion that stems from elasticity of flexure hinges in the parallel mechanism results in gain reduction of actuation. Therefore, static analysis is carried out by calculating directional stiffness and lost motions of actuation units, and is verified by finite element analysis (FEA). Dynamic analysis is performed based on modal analysis with linear mapping matrices to identify the dynamics of the parallel mechanism. Theoretical modal analysis is carried out and then verified by FEA and experiment. The identified lost motion and dynamics are expected to be exploited respectively for gain adjustment and dynamics enhancement for future studies on flexure-based precision parallel mechanisms with 6-DOF.
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