Abstract
The advantage of the Invariant Embedding method for the study of transport process in electron probe microanalysis (EPMA), is illustrated considering a model where the energy of the impinging electrons slows down on a ladder of states. Differential equations systems for the probability of the electrons being backscattered and for the contribution of these electrons to the detected X-ray intensity are obtained. Theoretical predictions of the model are compared with experimental results. It is shown that the proposed model describes the general trend of experimental data and leads to a good agreement for a wide range of atomic numbers.
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