Abstract
A new control algorithm for fast nanometer positioning is proposed. Conventional positioning with linear feedback control settles theoretically in an infinite time because of the constant feedback gain. In our positioning algorithm, the trajectory in the state space tracks a reference trajectory. This algorithm is equivalent to variable gain control. The positioning with this algorithm settles in a finite time with a target trajectory whose inclination is minus infinite at the target position. This algorithm is applied to the positioning of a one-axis linear stage with an AC linear motor and rolling ball guides. Experimental results show that the settling time is half of that with the conventional linear feedback control.
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