Abstract
This paper is not an original paper, but a review paper passed on our previous papers. We have been developing a few apparatuses for 2D and/or 3D profile measurement because these systems, especially 3D profiling systems, have become indispensable tools in manufacturing industry. However, in surface profile measurement, conventional systems have several short comings including being very large in size and heavy in weight. Therefore we propose to realize a compact portable apparatus on the basis of pattern projection method using a single MEMS mirror scanning. On the other hand, in the case of inner profile measurement for pipes or tubes, we propose to use optical section method by means of disk beam produced by a conical mirror. In these systems development of elements and devices such as a MEMS mirror and/or cone mirror play important role to apply our fundamental principles to practical apparatuses. We introduce the state of the art of these systems including commercialized products for practical purpose.
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