Abstract
Starting characteristics of triode and diode sputter-ion pumps are investigated as a function of a ratio V/S (sec.) and pressure, where V is a volume of vacuum chamber (1) and S is a nominal pumping speed (1/sec.). When the pressure is 10-3 Torr and the ratio V/S is approximately 1 sec., the starting time of triode is 7.8 times faster than that of diode. However, this time increases more significantly than that of diode with increase in V/S. In addition, it was found that the initial outgassing of triode pump when it was started under high vacuum region is smaller than the diode in more than one order. The difference in starting characteristics is considered to be mainly due to the difference in outgassing from the interior of the pump itself.
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