Abstract
Silicon is in many ways an ideal sensor material. Due to its preeminence in the electronics industry, it is widely available in low-cost, high-purity single crystal form. This, combined with an inherent range sensory effects and phenomena, ensures that as a raw material silicon has a critical role to play in the development of advanced sensor technologies. Piezoresistive, piezoelectric, capacitive and thermal properties, among others, can be used to quantify a range of physical parameters, including pressure, acceleration, force and flow. But, increasingly, silicon is beginning to penetrate chemical sensing markets – where it is being used to monitor acidity and the concentration of ionic and gaseous species – and, in the near future, silicon biosensors are set to be commercialized in Europe. Underpinning this diversification are advanced microengineering techniques that aim to reduce production costs and enhance device performance.
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