Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy

Abstract

The continuing miniaturization in many technologies - among them the optical systems - demands high-resolution measurements with uncertainties in the nanometre-range or even well below. A brief introduction of measurement methods used at the micro- & nanometre scale is therefore given as introduction. While a wide range of these methods are well established for the determination of various physical properties down to the nanometric scale, it is Scanning Probe Microscopy (SPM) that provides a unique direct access to topographic surface features in the size range from atomic diameters to some ten or hundred micrometres. With the increasing use of SPMs as quantitative measurement instruments, the demand for standardized calibration routines also for this type of instruments rises. However, except for a few specially designed set-ups mainly at National Metrology Institutes (e. g. PTB in Germany), measurements made with SPMs usually lack traceability to the metre definition. A number of physical transfer standards have therefore been developed and are already available commercially. While detailed knowledge of the standards' properties is a prerequisite for their practical applicability, the calibration procedure itself deserves careful consideration as well. As there is, up to now, no generally accepted concept how to perform SPM calibrations, guidelines are now being developed on various national and international levels, e. g. VDI/VDE-GMA in Germany and ISO. This papers discusses the draft of an SPM calibration guideline by focusing on several critical practical aspects of SPM calibration. The paper intends to invite the readers to take active part in guideline discussions.