Abstract
Multilayer aluminum-based structures reflecting at λ(HeI) = 58.4 nm were studied. Spectral and angular dependences of the reflection coefficient of these coatings were determined using a laboratory reflectometer and at the ELETTRA and BESSY II synchrotrons. The optical characteristics of multilayer Ru/Al and Mo/Al mirrors with a protective MoSi2 layer were found to be stable: the absolute change in the reflection coefficient within 18 months of storage in air was no larger than 1.5%. The peak near-normal reflection coefficient for Mo/Al mirrors at 58.4 nm was R = 26.1% with FWHM Δλ0.5 = 10 nm of the reflection curve.
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