Abstract
A closed loop phase shifting Fizeau-type interferometer is constructed by using the direct frequency modulation (FM) of a laser diode. The interferometer is servo controlled fully in the phase domain where optical phases are detected by a two-frequency optical heterodyne method. Detailed study on stabilization of the interferometer under feedback control is conducted both experimentally and theoretically. The interferometer showed a good stabilization against the applied vibration up to 200 Hz. The profile measurement of a mirror surface was conducted by the phase shifting analysis algorithm and a good measurement reproducibility of (lambda) /60 in the root mean square value was obtained for 10 times measurements in a period of 20 min.
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