Abstract
Stabilization of residual point defects at the finishing stages of noise diodes can be ensured by the selection of appropriate ignition modes and the environment of its conduct. The method and technology of reducing the concentration of point defects in the structure of p-n-transition, taking into account the content of impurities of secondary metals, oxygen and nitrogen is proposed. It has been established that the burning of readymade structures and diodes of noise generators in nitrogen environments at temperatures of 450…600 °С for (80 ± 3) min leads to an increase in spectral noise density and a significant (twice) reduction of its unevenness. The most important result of this burn is a reduction in the spread of the average values of the noise parameters studied: by 61.2 % in effective noise voltage; spectral density by 34.2 %; at the boundary frequency of the signal by 34.9 %; in non-linear density by 25.9 %. This improves the quality of random numerical sequences in information protection software systems.
Highlights
Одним из способов геттерирования дефектов в структуре является термообработка [2]
Stabilization of residual point defects at the finishing stages of noise diodes can be ensured by the selection of appropriate ignition modes
It has been established that the burning of readymade structures and diodes
Summary
СТАБИЛИЗАЦИЯ ШУМОВЫХ ПАРАМЕТРОВ ПРИ ОТЖИГЕ ВЫСОКОЛЕГИРОВАННЫХ СТРУКТУР ДИОДОВ – ГЕНЕРАТОРОВ ШУМА. Стабилизация остаточных точечных дефектов на финишных этапах изготовления шумовых диодов может быть обеспечена подбором соответствующих режимов отжига и среды его проведения. Предложен метод и технология снижения концентрации точечных дефектов в структуре p-n-перехода с учетом содержания в структурах примесей вторичных металлов, кислорода и азота. Установлено, что отжиг готовых структур и диодов генераторов шума в среде азота при температурах 450...600 °С в течение (80 ± 3) мин приводит к повышению спектральной плотности шума и значительному (почти двукратному) снижению ее неравномерности. Ключевые слова: технология диодов – генераторов шума, отжиг, твердотельная структура, примеси, дислокации. Буслюк В.В., Емельянов В.А., Баранов В.В., Дереченник С.С., Просолович В.С. Стабилизация шумовых параметров при отжиге высоколегированных структур диодов – генераторов шума.
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