Abstract
Laser confocal probe, on an active focus adjusting principle, was introduced in this paper. This kind of non-contact laser probe has the abilities to do the detection on strong reflection of the surface of high precision metal parts and optical devices. So, a problem of shape inspection detection was resolved. The micro-sphere is the key element in the ICF (short for inertial confinement fusion) system. The success or failure of "Ignition" is directly related to the accuracy of the assembly location of micro-sphere in the micro-target. Because of the particularity of the micro-sphere, laser confocal probe is used to do the detection of the center error of micro-sphere. The required measurement precision is less than 3µm. The mathematical formula between the height defference or the displacement value of measured surface and the displacement valued of the tuning fork can be gotten by the time different principle. Good stability of frequency and the swing of tuning fork, which approved through the experiments, have little influence to the time different Δt and the final measurement results.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
