Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source

Abstract

Established transfer standards such as Penning and hollow cathode discharge sources suffer from limited spectral range and, in particular, a limited lifetime and stability due to electrode erosion. The development of a vacuum-ultraviolet radiation source based on an electron cyclotron resonance (ECR)-created plasma might overcome these limitations. To test such a source with regard to its usefulness as radiometric transfer standard, the emission intensity of a Ne plasma was monitored over an operation period of 180 days, with regard to stability and reproducibility in the 50–75 nm wavelength range. For comparison and calibration, a hollow cathode was used as transfer standard traceable to the electron storage ring BESSY II as primary standard. It was found that the ECR source exceeded the lifetime of the hollow cathode source by far, offering a more balanced spectral emission line variety with similar stability.