Abstract

Rewritable compact discs (CDs) using magnetooptical (MO) materials have been developed. The disks were prepared by depositing Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> , TbFeCo alloy, Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> and Al films on polycarbonate substrates using a magnetron sputtering system. Sputter etching was carried out for the Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> layer proir to depositing the magnetic layer, with the very interesting result that the external magnetic field sensitivity was improved. The stability of the write power and magnetic field sensitivity of the above MO disks was investigated. This paper reports the relation between the recording sensitivity stability and the sputter etching effect.

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