Abstract
Planar optical waveguides were fabricated by proton implantation at 0.8 MeV in single crystals of lithium niobate (LiNbO3; Y-cut). Their thermal stability was investigated by measuring the evolution of the ordinary effective indices (TE modes) on thermal annealing in air and in the range of 250 to 350 degrees C. This evolution is compared to that of the nuclear damage induced by implantation effects which is analysed by channeling Rutherford backscattering. It is shown that an optical barrier does exist and optical modes can be excited, although the lattice damage is reduced by annealing to a value as low as the one of an unimplanted sample. Since the observed thermal stability of the waveguides is rather good, proton implantation in LiNbO3 offers high potentiality for the elaboration of optical integrated devices.
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