Abstract
In this paper, the stability of bakeable capacitance diaphragm gauges is studied. In particular, an investigation of their stability before and after a controlled series of bakes is undertaken. It is found that baking results in appreciable shifts of the zero offset, but that these can easily be corrected at time of use. However, sensitivity, linearity and higher order calibration factors cannot be corrected at time of use. So it is essential to understand the effect of baking if one wishes to use similar gauges in a system that requires heat treatment. For the gauges in this study, baking introduces a minimal additional uncertainty, and the total uncertainty can be kept to below about 0.3% at the k=2 confidence level (95%).
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