Abstract
This paper discusses the stability of a piezoresistive, LTCC-based, pressure sensor that was designed for measurements in a low-pressure range below 100 mbar. The intrinsic stability of the sensor's offset was evaluated at a constant ambient temperature and different conditions regarding the atmospheric humidity. The sensors were also subjected to functional fatigue tests, which included a full-scale and an overload pressure cycling. The results of the fatigue testing revealed the vulnerability of the sensor's structure from the point of view of the long-term stability and the life-cycle. Nevertheless, the stability of the key characteristics of the prototype sensors was found to be satisfactory for accurate measurements in the low-pressure ranges.
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