Abstract
Life test stability and failure mechanism of RuO 2-based thick film resistors at elevated temperature and high humidity have been examined. It is found that the change of resistance under high humidity conditions is caused mainly by reaction of RuO 2 + xH 2O → RuO 2: xH 2O, and that the resistance value of RuO 2:Ag:Glass in the high temperature conditions mainly due to oxidation of Ag, and that initial drift and internal strain in the resistors tend to be influenced by the firing conditions. In the case of the resistors having conductive component of solid solution of RuO 2 and other metals (exp. Bi 2Ru 2O 7), the resistors have little resistance drift and are stable.
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