Abstract
The paper presents an overview and reports the recent progress of research on squeeze film air damping in MEMS. The review starts with the governing equations of squeeze film air damping: the nonlinear isothermal Reynolds equation and various reduced forms of the equation for different conditions. After the basic effects of squeeze film damping on the dynamic performances of micro-structures are discussed based on the analytical solutions to parallel plate problems, recent research on various aspects of squeeze film air damping are reviewed, including the squeeze film air damping of perforated and slotted plate, the squeeze film air damping in rarefied air and the squeeze film air damping of torsion mirrors. Finally, the simulation of squeeze film air damping is reviewed. For quick reference, important equations and curves are included.
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