Sputtering Yields of Si Bombarded with 10–540-keV C60 Ions

Kazumasa Narumi,Keisuke Yamada,Atsuya Chiba,Hiroshi Naramoto,Yuichi Saitoh

doi:10.3390/qubs6010012

Kazumasa Narumi, Keisuke Yamada + Show 3 more

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https://doi.org/10.3390/qubs6010012

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Abstract

Sputtering yields of Si have been measured for C60 ions in the energy range from 10 to 540 keV, where the nuclear stopping is dominant, by measuring thickness change of a pre-amorphized layer with conventional Rutherford-backscattering spectroscopy. The measured sputtering yield shows the maximum, which is approximately 600 Si/C60, around 100 keV. Comparing with the sputtering yields for a monatomic ion calculated both based on the linear-collision-cascade theory of Sigmund and using the SRIM2008 code, nonlinear effect on the sputtering yield has been observed. The nonlinear effect depends on the energy of C60 ions: it is very large around the energies where the sputtering yield has the maximum and hardly observed at 10 keV.

Highlights

The nonlinear effect depends on the energy of C60 ions: it is very large around the energies where the sputtering yield has the maximum and hardly observed at 10 keV
The projected range of 540-keV C60 ions in Si is 31 nm, which was the maximum one in this study and was estimated with the SRIM2008 code; in addition, the thickness of an amorphous layer after C60 -ion irradiation was approximately 210 nm at least in this study; it was thick enough to stop the projectiles within the amorphous layer, whatever their energy
Quantum Beam Sci. 2022, 6, 12 experimental Si sputtering yields for C monatomic ions are not available, the Si sputtering yield for a monatomic ion was calculated both based on the linear-collision-cascade theory of Sigmund [4] and using the SRIM2008 code [9]

Summary

Introduction

Sputtering Yields of Si Bombarded with10–540-keV C60 Ions. Quantum BeamSci. 2022, 6, 12. https://doi.org/10.3390/qubs6010012Academic Editor: Klaus-Dieter LissReceived: 1 November 2021Accepted: 24 February 2022Published: 9 March 2022Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations.Licensee MDPI, Basel, Switzerland. Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations

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