Sputtering of titanium and zirconium by fusion plasma impurity ions

Abstract

Sputtering yields of the getter materials titanium and zirconium for incident ion energies in the range of 100 eV to 20 keV are reported. In addition to ions of the respective target materials, O + and Ne + ions were also used as projectiles. Measurements were made at room temperature and in the case of oxygen also at a target temperature of 550°C to investigate chemical effects. Experimental data are determined by the integral mass change method. Experimental results are compared with those calculated from an analytical relation based on a modified collision cascade theory.