Abstract
When the unanalyzed beam from a radiofrequency ion source strikes a silver target, sputtering is caused by both the ions and the neutral particles in the beam. The sputtering due to neutrals alone has been measured by removing the ions from the beam magnetically. For a beam of 40 μA at normal incidence and 10 kv energy, in the case of hydrogen over 90%, and in the case of helium about 50% of the sputtering is due to neutrals.
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