Abstract
The sputtering ratio from plycrystalline Au, was measured as a function of ion energies. The gold specimens were bombarded with inert gas ions (A+ and Xe+) of the energie from 20 to 50 keV. The coefficients of cathode sputtering were determined experimentally: by gravimetric analysis of weight losses during the bombardment and by spectrophotometric analysis of gold deposit after being desolved from the glass collector. Experimental results are in good mutual agreement. Furthermore, they are in accordance with the values as calculated from Roll's and Sigmund's theory. The intensity maximum of the particles sputtered from a single crystal ((100) plane), corresponds to the close packed directions ([110] for gold)The results of investigations of bombarded metal surfaces by the method of replicas, show that a change in surface structure occurs during the bombardment. Nonuniform sputtering preferentially develops certain crystal faces, and the surface structure of each individual grains degenerate into a undulation sputtering structure.
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