Abstract
The paper reports the results of an experimental study of sputtering of a polycrystalline CuPt alloy irradiated with Ar+ ions with energies of 20 keV and 80 keV. The sputtering yield of the alloy was measured using Rutherford backscattering of He+ ions with an energy of 2 MeV. It is found that the sputtering yield of the alloy is less than the corresponding value for Cu, but higher than the value for Pt. The results are discussed in the framework of modern concepts about the preferential sputtering of multicomponent materials.
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