Sputtering of Cu-Ni alloys at elevated temperature

Abstract

Listen

Translate article

In situ AES measurements of the surface compositions of both a sputter-deposited layer and the sputtered surface of Cu-Ni alloys at high temperatures reveal that Cu atoms are sputtered from the surface of Cu 50-Ni 50 alloys much more than Ni atoms, and that the equilibrium state is no longer attained during sputtering at temperatures above 200°C. This results in a depletion layer of denuded zone of copper of significant depth in the samples, the depth depending on the sample temperature. Assuming that the sputtering process does not change for Cu-Ni alloys at sample temperatures below 400°C from that for pure Cu and Ni samples, the present results suggest that the substantial enrichment of copper at the outmost atom layer occurs.