Abstract
Characteristics of Penning-ionization-gauge-type compact microwave metal-ion source are described. This ion source can operate with two different discharge modes: the positive-resistance region mode and the negative-resistance region mode. In the positive-resistance region, a normalized emittance of a Ta+-ion beam is 1.8×10−7 m rad, the plasma density is 4×1012 cm−3, and the electron temperature is about 6 eV. In the negative-resistance region, the emittance is 2.7×10−7 m rad. This ion source is suitable for operation in the positive-resistance region where the microwave discharge is dominant.
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