Abstract
Sputtering yields and changes of relief for Cu-Ni alloys with different concentration (2.5, 10, 20, 50, 80% of Ni) under 600 eV Ar+ ion bombardment in the temperature range 100–600°C were investigated. It has been proved that the sputtering rate of alloys decreases with an increase of the bombardment dose. Analysis of irradiated surfaces by the SEM method has shown that ion bombardment stimulates the growth of cone-like features on the surface. For high doses (5–6 × 1019ioncm2), the surface appeared to be covered by narrow disposed hills with a height of a few μm. The sputtering yield, density and sizes of the hills very weakly depend on the dose of bombardment.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.