Abstract
An all sputter process has been developed to fabricate thin-film solid oxide fuel cells (TF-SOFCs) using conventional materials. The process involves sequential sputtering of cell components onto a porous substrate; for example, anode such as nickel-yttria stabilized zirconia (Ni-YSZ), followed by electrolyte such as YSZ, interlayer such as gadolinium doped ceria (GDC), and then cathode such as lanthanum strontium cobalt perovskite (LSC)-GDC onto porous substrate such as anodized aluminum oxide (AAO). Process conditions and sputtering procedures have been tailored and engineered to produce the components with desired structural characteristics, i.e., fully dense electrolyte and interlayer and porous anode and cathode. The porous electrodes show a columnar structure with branch-like nano-fibers. Sputtered TF-SOFCs exhibit superior performance at reduced temperatures; for example, peak power density of about 3.0 W/cm2 at 650○C on H2 for the cell Ni-YSZ/YSZ/GDC/LSC-GDC, peak power density of about 2.6 W/cm2 at 700○C on CH4 for the cell Ni-GDC/YSZ/GDC/LSC-GDC.
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