Abstract
Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.
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