Abstract
Many of the electrode requirements of sandwich structure light valve devices using either ferroelectric ceramic plates or liquid crystal layers as the control medium have been satisfied by sputter-deposited layers. The sputtering parameters can be modified to allow film deposition within the constraints of a given substrate material such that useful photoconductive layers are obtained on thermally sensitive as well as thermally stable substrates. The use of Cd 1− x Zn x S films permits selection of the photoconductivity peak to match the specific emission of a laser. These Cd 1− x Zn x S films also permit greater visible light transmission, can be relatively insensitive to projection light, posses dark resistivity in excess of 10 12ohms cm and are suited to real-time display applications. Sputter-dedeposited layers of CdS, though of narrower band gap than Cd 1− x Zn x S, can be deposited with photoconductive gain of the order of 4 × 10 3 and dadrk resistivity in excess of 10 7 ohms cm. Transparent electrodes of sputter-deposited In 2− x Sn x O 3− y have excellent mechanical, elecrrical and optical properties. Routine deposition of films with less than 3×10 −4 ohms cm resistivity on thermally stable substrates and with resistivity less than 10 −3 ohms cm on thermally sensitive substrates has been demonstrated.
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