Abstract

One of the key problems in the deposition of multicomponent films is to gain the correct and desired elemental composition of the film. This paper gives an overview about processes during sputter deposition, which influence the elemental composition of multicomponent thin films. Additionally experimental and theoretical results for the ion beam sputter deposition (IBSD) of NiFeMo and WTi alloys are presented. For both alloys the composition of the deposited films show a strong dependence of various parameters of the deposition process.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.