Sputter deposition of 2000 Å thick crack-free chromium alloy films onto ABS plastics

Abstract

Sputtering thin films of chromium and chromium alloys onto ABS plastics is a technique for producing bright work in exterior automotive applications. Because the throwing power of the sputtering source produces a four to one variation in thickness between the horizontal and vertical surfaces, a horizontal surface of at least 1200 Å may be required for acceptable metallic appearance. Films of this thickness are prone to microcracking. This paper discusses a technique to produce microcrack-free chromium alloy films by using substrate heating just prior to metallization.