Sputter deposited W1–x–yNixTiyO3 thin films: Electrochromic properties and durability

Abstract

Previous research demonstrated that a small amount of nickel enhances the coloration efficiency of tungsten-nickel oxide electrochromic (EC) thin films with respect to that of pure tungsten oxide (WO3) films. Furthermore the incorporation of titanium gives an improvement in the durability of tungsten-titanium oxide EC thin films. In this work we investigated the EC performance of tungsten-nickel-titanium oxide (W1–x–yNixTiyO3) EC thin films with emphasis on durability. The films were deposited on indium tin oxide covered glass by reactive dc sputtering from tungsten, tungsten-titanium alloy and nickel targets. Cyclic voltammetry was performed using 1 M LiClO4 in propylene carbonate as electrolyte. The voltage window was chosen to induce fast degradation of the samples within 80 cycles. Elemental compositions were obtained by Rutherford Backscattering Spectroscopy.