Abstract
Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by reactive radio frequency (rf) magnetron sputtering from Li 3PO 4 powder compact target. High deposition rates and ease of manufacturing powder target compared with conventional ceramic Li 3PO 4 targets offer flexibility in handling and reduce the cost associated. Rf power density varied from 1.7 Wcm − 2 to 3 Wcm − 2 and N 2 flow from 10 to 30 sccm for a fixed substrate to target distance of 4 cm for best ionic conductivity. The surface chemical analysis done by X-ray photoelectron spectroscopy showed incorporation of nitrogen into the film as both triply, N t and doubly, N d coordinated form. With increased presence of N t, ionic conductivity of LiPON was found to be increasing. The electrochemical impedance spectroscopy of LiPON films confirmed an ionic conductivity of 1.1 × 10 − 6 Scm − 1 for optimum rf power and N 2 flow conditions.
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