Abstract

The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET´s for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures.

Highlights

  • The spray pyrolysis technique is a low-cost, non-vacuum required, way to synthesize materials in the form of powders and films

  • This review describes some of the very extensive research work about the spray pyrolysis technique, which without doubt, is an extraordinarily flexible and practical materials synthesis method

  • It is a low-cost, non-vacuum required, way to synthesize materials in the form of powders and films deposited over a wide variety of substrates, and can be adapted for large area deposition and industrial production processes

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Summary

Introduction

The spray pyrolysis technique is a low-cost, non-vacuum required, way to synthesize materials in the form of powders and films. In the case of TCO’s and their relevance for photovoltaic applications, a considerable amount of effort was set to optimize their optical transparency in the visible and electrical conductivity characteristics This was the case for indium-tin oxides (ITO), indium-Zinc Oxide (IZO), fluorinated-tin oxide (FTO) and many others [1,3]. Coatings were developed to modify the optical absorption/transmittance, and emissivity of flat glass for the automotive, as well as construction industries They were developed for multiple layered structures, such as planar waveguides and resonant optical cavities for photonics [11,12,13], as well as semiconducting and metal oxide layers. A revision of the work involving the spray pyrolysis technique (published in the later period of time) will be presented This focuses on the high-K dielectric and luminescent properties of coatings and powders as well as multiple layered structures. The main characteristics of high-K dielectric materials deposited on different type of substrates will be discussed, as well as the luminescent characteristics of both powders and coatings of materials obtained by the incorporation of dopants in a suitable matrix

Spray Pyrolysis as Materials Synthesis Technique
High-K Dielectric Films
High-K Dielectrics Materials
Synthesis of Al2O3 Thin Films by USP Technique
Experimental Details
Y2O3 and ZrO2 Films
Luminescent Materials
Findings
Conclusions
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