Abstract
A focused as opposed to collimated light beam is typically used as probe in order to achieve a smaller as well as more intense light interrogation area in spectroscopic ellipsometry of thin films. In this work, we performed geometric ray analysis at the illumination and recording ends of such a system. The numerical results revealed substantial changes in (i) average optical path length and (ii) optical path length differences, which varied according to wavelength despite the film thickness remaining uniform. These results were able to consistently explain the anomalies found when different focus probe beam sizes were used in experimental spectroscopic ellipsometry measurements.
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