Abstract
The depth profiles of hydrogen concentration in Ti-evaporated films on NaCl substrates have been measured with the elastic recoil detection analysis technique using a 2.7 MeV 4He+ beam. It has been revealed that the Ti film absorbs hydrogen escaped from the substrate. The hydrogen concentration in the film decreased with increasing substrate temperature. It is pointed out that the epitaxial growth of substances with a great affinity for hydrogen, evaporated on NaCl or deliquescent alkali halide substrates, should be re-examined from the point of view of hydrogenation on the substrate.
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