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Abstract
A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.
Highlights
Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor† Cite this: Nanoscale, 2018, 10, 14395
The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication
Gravimetric biosensors based on thin film bulk acoustic wave (BAW) resonators have attracted significant interest in recent years mainly due to their high sensitivities, small size and low power, which makes them well-suited to mobile sensing applications, such as point-of-care medical diagnostics.[1]
Summary
Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor† Cite this: Nanoscale, 2018, 10, 14395.
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