Spinning rotor gauge in the range from 10−4 to atmospheric pressure

Abstract

Many industrial applications require measuring pump down pressure trends over several orders of magnitude, in various sensor positions. The SAES Vacuum Gauge (SVG1) senses from 10−4 Pa to atmospheric pressure with orientation-independent positioning. A temperature sensor was added to the conventional spinning rotor gauge to compensate for the thermal response; new magnets were added to stabilize the levitation. A nonlinear data processing algorithm was developed to stabilize the gauge over the expanded pressure range. The SVG1 range is larger than a traditional spinning rotor gauge (10−4–1 Pa), and capacitance manometers (1–105 Pa).