Abstract

Two kinds of Spindt-type cathode arrays with vertically aligned carbon nanotubes (CNTs) emitters were fabricated. One process involved direct growth of CNTs from the bottom of each micro-cell and the other process was to grow CNTs on Mo tips in Spindt-type cathode arrays. The former had fairly good consistent emitters with a number of CNTs, whereas the latter showed a few or single CNTs in micro-sized cells could be formed.

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