Spindle vibration induced optical performance deterioration and its trans-scale characterization for diamond turned large-aperture optics

Abstract

In ultra-precision diamond turning of large-aperture optics, the spindle vibration (SV) would cause a deterioration of optical performance. To discuss this issue, the spindle vibration was first excited by a series of designed mass center errors for diamond turning of large-aperture optics. Then, a trans-scale characterization was developed to reveal its dynamic behaviors by combining a white light interferometer and laser interferometer. Next, the amplitude variations were quantitatively evaluated by surface texture parameters and the scale bandwidth was revealed through power spectrum density (PSD). Finally, the point spread function (PSF), encircled energy ratio (EER), and modulation transfer function (MTF) were analyzed and compared. The results indicated that, with the increased SV, Sq and Sz increased and Ssk and Sku showed a transition from skew to normal height distribution. PSD showed that spindle vibration mainly affected the large-scale components rather than the small-scale components. The shape of PSF changed from a standard ring to a dispersed half ring. At the 1 µm radius of the Airy disk, the EER decreased from 82.0% (no SV) to 27.5% (high SV). At the scale of 200mm−1, the MTF decreased from 0.84 (no SV) to 0.44 (high SV). The work provides a fundamental understanding of the evolutionary mechanism of spindle vibration induced optical performance deterioration.