Spin Coated Nano Scale PMMA Films for Organic Thin Film Transistors

Abstract

Abstract Nano scale poly methyl methacrylate (PMMA) films are prepared by spin coating the solution of PMMA on to p-Si substrate. The thickness of the films coated is measured by Ellipsometry. The SA-XRD spectrum of the as grown and annealed films indicated the amorphous nature. The SEM analysis revealed no pinholes, pits and dendritic features on the surface. Both as grown and annealed films indicated smooth surface and amorphous structure. The capacitance-voltage (C-V) behaviour of the metal-insulator-semiconductor (MIS) structure with Al/PMMA/p-Si has been studied. The C-V behaviour carried out for various frequencies (f) ranging from 20 kHz to 1 MHz and for a bias voltage range of -20 V to +20 V. Both as grown and annealed films showed a small flat band voltage (VFB) shift towards the negative voltage. The small shift in the VFB observed may be due to charge traps and de-traps. The obtained C-V behaviour for as grown and annealed films indicated that as grown PMMA nano scale thin films do not have many defects such as voids and inhomogeneity etc. The observed C-V behavior, a very low shift in the flat band voltage (VFB 0); reasonably higher dielectric constant values; thermal stability up to 2800C; amorphous and smooth surface implies that nano scale thin PMMA film coated by spin coating could be used as an efficient dielectric layer in field effect organic thin film transistors (OTFTs).